Category
Materials characterization
Manufacturer and Model
Amatec - Dycor LC-D
Specifications
- Electric quadrupole field for ion mass selection
- Mass range 1-200 atomic mass units (amu)
- Resolution aprox. 0.5 amu
- Minimum detectable partial pressure 10-12 Torr
- Operating pressure range 10-4 to UHV
Applications and capabilities
- Control and diagnostics of technological processes or applications making use of vacuum or controlled gas atmosphere
- Vacuum leak detection
- Surphace cleanness and gas adsorption-desorption measurements
- chemical analysis in conjunction with laser ablation