MULTIFUNCTIONAL CLUSTER TOOL FOR VACUUM COATINGS: PARAMETERS, POSSIBILITIES, CURRENT PROJECTS
Dr.habil.phys. Juris Purāns (ISSP UL EXAFS Laboratory of Spectroscopy)
ISSP UL and JSC "SIDRABE" developed a new technology and created multifunctional cluster tool for obtaining vacuum coating, which was manufactured by JSC "SIDRABE". The tool is universal: there are no restrictions on the materials that can be used to make coatings. Assemblage meets the needs of several ISSP laboratories.
Modular device with separate (independent) coating chambers connected to one central chamber.
Separate chambers:
- Loading / unloading chamber equipped with ion cannon for pre-treatment of the surface to be coated;
- Magnetron sputtering chamber for metal and semiconductor coatings high purity, no reactive gases are used in the chamber);
- Magnetron sputtering camber for oxide, nitride, hydride coatings;
- Thermal evaporation chamber for metals;
- Thermal sublimation chamber for organic coatings;
Opportunities:
- For multi-layer coatings, the sample can be moved from one chamber to another without being removed from the device;
- Alloyed solid solutions, bicomponent oxides, nitrides, hydrides.