ISSP UL Scientific workshop

The semiconductor processing technology has developed immensely during the last decades and is today an extremely efficient production technique for all kinds of electronic, photonic and mechanic devices on a nano and micro scale. The basic semiconductor processing technologies will be described in some detail, based on the Electrum Laboratory process lines for Si-CMOS, Si-MEMS, SiC power electronics, and optoelectronics in InP and GaAs. Key processes – where scientific contributions are made – are materials synthesis, especially epitaxy; stepper lithography; and precision dry etching. The other necessary processes are also available, as well as state-of-the-art characterization techniques, both for materials- and device characterization. Applications are in the fields of life science, energy and environment, transportation, automation and process, communication, and safety and security. The laboratory usage spans the whole range from education and development, to small scale production. An innovation system is available, necessary to foster successful companies from research results. This system involves a few partners, with different goals and means of operation, e.g., KTH Business Liaison, the research institute Acreo, and the business incubator STING. The quality system is a guarantee for efficiency, repeatability, and high up-time, and is certified according to the ISO9001:2008 standard. The certification facilitates the communication with industrial customers and validates us as a reliable partner. In addition, the collaborations with laboratory partners within the national Myfab network and the Technet_nano network are invaluable to offer complete lab services. Start-up companies are invited to stay at the Electrum Laboratory during development of business and technology. Hence access to all the lab facilities is offered, as well as the possibility to rent lab space for proprietary tools. In addition, the environment with researchers, developers, technical staff and entrepreneurs working together enhances the innovation potential. Process services are offered, as well as the possibilities to perform research and development projects in collaboration with KTH and Acreo. A number of companies grown up in this environment have moved out to build up their own operation, hence giving place to new research projects and eventually new spin-offs.